التفاصيل البيبلوغرافية
العنوان:
Origin of Vt Instabilities in High-$k$ Dielectrics Jahn–Teller Effect or Oxygen Vacancies
المؤلفون:
M. Denais , G. Ribes , C. Parthasarthy , Gerard Ghibaudo , Vincent Huard , T. Skotnicki , M. Muller , Sylvie Bruyere , David Roy
المصدر:
IEEE Transactions on Device and Materials Reliability . 6:132-135
بيانات النشر:
Institute of Electrical and Electronics Engineers (IEEE), 2006.
سنة النشر:
2006
مصطلحات موضوعية:
Materials science , biology , Condensed matter physics , Jahn–Teller effect , chemistry.chemical_element , Trapping , Dielectric , Hafnia , biology.organism_classification , Oxygen , Electronic, Optical and Magnetic Materials , chemistry , Electrical and Electronic Engineering , Safety, Risk, Reliability and Quality , Quantum tunnelling , High-κ dielectric , Monoclinic crystal system
الوصف:
In this paper, an analysis of the trapping in high- dielectrics and its origin is given. It is found that the defect is consistent with oxygen vacancies in monoclinic hafnia. Finally, guidelines are proposed to reduce these instabilities
تدمد:
1530-4388
URL الوصول:
https://explore.openaire.eu/search/publication?articleId=doi_________::598b6fa0fe1e4e15fec8f24719d2e65b https://doi.org/10.1109/tdmr.2006.877867
حقوق:
CLOSED
رقم الأكسشن:
edsair.doi...........598b6fa0fe1e4e15fec8f24719d2e65b
قاعدة البيانات:
OpenAIRE
