AFM Integrated with SEM and FIB: A Synergistic Union

التفاصيل البيبلوغرافية
العنوان: AFM Integrated with SEM and FIB: A Synergistic Union
المؤلفون: Oleg Fedoroyov, Anatoly Komissar, Dalia Yablon, Hisham Taha, A. Ignatov, Aaron Lewis, Eran Maayan
المصدر: Microscopy Today. 21:26-31
بيانات النشر: Oxford University Press (OUP), 2013.
سنة النشر: 2013
مصطلحات موضوعية: Materials science, General Computer Science, Ion beam, Scanning electron microscope, Atomic force microscopy, Basic research, Nanotechnology, Nanoscopic scale
الوصف: Scanning electron microscopy (SEM) and ion beam milling techniques are mature nanoscale measurement technologies, whereas atomic force microscopy (AFM) is a developing technology generating intense interest in the scientific community for basic research and development. These techniques have generally existed in separate worlds. This article discusses a capability that marries these technologies through an instrument recently introduced by Nanonics, the 3TB4000.
تدمد: 2150-3583
1551-9295
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5e48a7e71c9b1368f0319114ac496124
https://doi.org/10.1017/s1551929513001090
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........5e48a7e71c9b1368f0319114ac496124
قاعدة البيانات: OpenAIRE