Detection characteristics of a strain of a thin silicon mechanical structure by micro-Raman spectroscopy

التفاصيل البيبلوغرافية
العنوان: Detection characteristics of a strain of a thin silicon mechanical structure by micro-Raman spectroscopy
المؤلفون: Etsuo Maeda, Reo Kometani, Kou Okada
المصدر: The Proceedings of Mechanical Engineering Congress, Japan. 2017:J2210401
بيانات النشر: Japan Society of Mechanical Engineers, 2017.
سنة النشر: 2017
مصطلحات موضوعية: Materials science, Strain (chemistry), Silicon, chemistry, chemistry.chemical_element, Composite material, Micro raman spectroscopy
تدمد: 2424-2667
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6225cc9e06fc07706c19bba2cb1afcdc
https://doi.org/10.1299/jsmemecj.2017.j2210401
رقم الأكسشن: edsair.doi...........6225cc9e06fc07706c19bba2cb1afcdc
قاعدة البيانات: OpenAIRE