Air damping effect on the air-based CMUT operation
| العنوان: | Air damping effect on the air-based CMUT operation |
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| المؤلفون: | Bu-sang Cha, Masanori Okuyama, Seung-Mok Lee, Takeshi Kanashima |
| المصدر: | Journal of the Korean Physical Society. 67:486-495 |
| بيانات النشر: | Korean Physical Society, 2015. |
| سنة النشر: | 2015 |
| مصطلحات موضوعية: | Physics, Damping ratio, Acoustics, Capacitive sensing, technology, industry, and agriculture, food and beverages, General Physics and Astronomy, respiratory system, body regions, Vibration, Capacitive micromachined ultrasonic transducers, Q factor, biological sciences, Magnetic damping, Damping torque, Laser Doppler vibrometer |
| الوصف: | The vibration amplitude, damping ratio and viscous damping force in capacitive micromachinedultrasonic transducers (CMUTs) with a perforated membrane have been calculated theoretically and compared with the experimental data on its vibration behavior. The electrical bias of the DC and the AC voltages and the operation frequency conditions influence the damping effect because leads to variations in the gap height and the vibration velocity of the membrane. We propose a new estimation method to determine the damping ratio by the decay rate of the vibration amplitudes of the perforated membrane plate are measured using a laser vibrometer at each frequency, and the damping ratios were calculated from those results. The influences of the vibration frequency and the electrostatic force on the damping effect under the various operation conditions have been studied. |
| تدمد: | 1976-8524 0374-4884 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::6634d47b3790dcc31c83933054edeb49 https://doi.org/10.3938/jkps.67.486 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........6634d47b3790dcc31c83933054edeb49 |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Springer Verlag. | تدمد: | 19768524 03744884 |
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