The thermophysical properties of V2O5 films as functions of temperature and crystallization are investigated and characterized by measuring the Hall and Seebeck coefficients. The carrier density and electrical conductivity of the amorphous and crystalline V2O5 films increase with increasing temperature and show a strong dependence on the crystallization. However, the carrier mobility of the films is inversely proportional to temperature and crystallization due to increased carrier scattering in terms of the thermal phonon and boundaries by the crystallites. The Seebeck coefficients of the films are negative, indicating n-type conduction, and show a stronger dependence on crystallization than temperature. In particular, the crystalline V2O5 film demonstrates considerably large Seebeck coefficients in the range of −385 to −436 μV K−1 from 300 to 410 K. Both power factors of the films are calculated to be 5.76 × 10−9 and 3.12 × 10−7 W m−1 K−2 at 410 K, respectively.
