Electric-Field-Assisted Contact Mode AFM-Based Nanolithography with Low Stiffness Conductive Probes
| العنوان: | Electric-Field-Assisted Contact Mode AFM-Based Nanolithography with Low Stiffness Conductive Probes |
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| المؤلفون: | Huimin Zhou, Yingchun Jiang, Christopher M Dmuchowski, Changhong Ke, Jia Deng |
| المصدر: | Journal of Micro and Nano-Manufacturing. |
| بيانات النشر: | ASME International, 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | Mechanics of Materials, Process Chemistry and Technology, Industrial and Manufacturing Engineering |
| الوصف: | Electric-field-assisted atomic force microscope (E-AFM) nanolithography is a novel polymer-patterning technique that has diverse applications. E-AFM uses a biased AFM tip with conductive coatings to make patterns with little probe-sample interaction, which thereby avoids the tip wear that is a major issue for contact-mode AFM-based lithography, which usually requires a high probe-sample contact force to fabricate nanopatterns; however, the relatively large tip radius and large tip-sample separation limit its capacity to fabricate high-resolution nanopatterns. In this paper, we developed a contact mode E-AFM nanolithography approach to achieve high-resolution nanolithography of poly (methyl methacrylate) (PMMA) using a conductive AFM probe with a low stiffness (~0.16 N/m). The nanolithography process generates features by biasing the AFM probe across a thin polymer film on a metal substrate. A small constant force (0.5-1 nN) applied on the AFM tip helps engage the tip-film contact, which enhances nanomachining resolution. This E-AFM nanolithography approach enables high-resolution nanopatterning with feature width down to ~16 nm, which is less than one half of the nominal tip radius of the employed conductive AFM probes. |
| تدمد: | 2166-0476 2166-0468 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::7052233a3b95e407be77a3c49b5d0941 https://doi.org/10.1115/1.4054316 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........7052233a3b95e407be77a3c49b5d0941 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 21660476 21660468 |
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