P‐50: Study on the New Monitoring Method for Ion Implanter using Microwave Photoconductive Response in the Large Size Glass
| العنوان: | P‐50: Study on the New Monitoring Method for Ion Implanter using Microwave Photoconductive Response in the Large Size Glass |
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| المؤلفون: | Steve Jeons, Qing Wang, Zai-Rong Wu, Zhi-Wei Zhao, Shun-Kang Su, Song-Lin Liu |
| المصدر: | SID Symposium Digest of Technical Papers. 51:1534-1537 |
| بيانات النشر: | Wiley, 2020. |
| سنة النشر: | 2020 |
| مصطلحات موضوعية: | Ion implantation, Materials science, business.industry, Photoconductivity, Optoelectronics, Monitoring methods, business, Large size, Microwave |
| تدمد: | 2168-0159 0097-966X |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::7192108ad685707896f1c99e16814abb https://doi.org/10.1002/sdtp.14181 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........7192108ad685707896f1c99e16814abb |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 21680159 0097966X |
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