Topographic and material contrast in low-voltage scanning electron microscopy
| العنوان: | Topographic and material contrast in low-voltage scanning electron microscopy |
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| المؤلفون: | J. Hejna |
| المصدر: | Scanning. 17:387-394 |
| بيانات النشر: | Wiley, 2006. |
| سنة النشر: | 2006 |
| مصطلحات موضوعية: | Conventional transmission electron microscope, Materials science, Physics::Instrumentation and Detectors, Scanning electron microscope, business.industry, Detector, Scanning confocal electron microscopy, Low-voltage electron microscope, Atomic and Molecular Physics, and Optics, Optics, Scanning transmission electron microscopy, Electron beam-induced deposition, business, Instrumentation, Environmental scanning electron microscope |
| الوصف: | Two scintillation backscattered electron (BSE) detectors with a high voltage applied to scintillators were built and tested in a field emission scanning electron microscope (SEM) at low primary beam energies. One detector collects BSE emitted at low take-off angles, the second at high takeoff angles. The low take-off detector gives good topographic tilt contrast, stronger than in the case of the secondary electron (SE) detection and less sensitive to the presence of contamination layers on the surface. The high take-off detector is less sensitive to the topography and can be used for detection of material contrast, but the contrast becomes equivocal at the beam energy of 1 keV or lower. |
| تدمد: | 1932-8745 0161-0457 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::7557e64a870e1378e94747c3e04e2da2 https://doi.org/10.1002/sca.4950170607 |
| حقوق: | OPEN |
| رقم الأكسشن: | edsair.doi...........7557e64a870e1378e94747c3e04e2da2 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 19328745 01610457 |
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