Experimental demonstration of silicon photonic devices optimized by a flexible and deterministic pixel-by-pixel technique
| العنوان: | Experimental demonstration of silicon photonic devices optimized by a flexible and deterministic pixel-by-pixel technique |
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| المؤلفون: | L. Baud, Cecilia Dupre, Karim Hassan, Salim Boutami, Shanhui Fan |
| المصدر: | Applied Physics Letters. 117:071104 |
| بيانات النشر: | AIP Publishing, 2020. |
| سنة النشر: | 2020 |
| مصطلحات موضوعية: | 010302 applied physics, Silicon photonics, Physics and Astronomy (miscellaneous), Pixel, business.industry, Computer science, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Reliability (semiconductor), 0103 physical sciences, Electronic engineering, Figure of merit, Photonics, 0210 nano-technology, business, Lithography, Realization (systems), Immersion lithography |
| الوصف: | We present the experimental realization of photonic devices optimized by a pixel-by-pixel binary optimization method, which can straightforwardly take into account the technological constraints such as minimum feature sizes in the fabrication process. In this approach, for each iteration, one considers all the candidate structures that differ by a single pixel from the starting structure and update by adopting the structure that has the best figure of merit among all candidate structures. This approach can be implemented with high computational efficiency using a Green's function method. The devices optimized by this approach have been realized on 200 mm and 300 mm Silicon-On-Insulator platforms, using either e-beam lithography or deep-UV immersion lithography. Characterizations experimentally demonstrate the reliability of the method, given the technological constraints of Silicon Photonics. |
| تدمد: | 1077-3118 0003-6951 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::759755aefef8f3193107fa23900cd0d3 https://doi.org/10.1063/5.0013558 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........759755aefef8f3193107fa23900cd0d3 |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Scitation. | تدمد: | 10773118 00036951 |
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