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Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical & chemical properties and suitability for piezoelectric device integration

التفاصيل البيبلوغرافية
العنوان: Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical & chemical properties and suitability for piezoelectric device integration
المؤلفون: M.A. Signore, L. Velardi, C. De Pascali, I. Kuznetsova, L. Blasi, F. Biscaglia, F. Quaranta, P. Siciliano, L. Francioso
المصدر: Applied Surface Science. 599:154017
بيانات النشر: Elsevier BV, 2022.
سنة النشر: 2022
مصطلحات موضوعية: General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films
تدمد: 0169-4332
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8971bc5b8166dfc25fc9f3bb2fa71efd
https://doi.org/10.1016/j.apsusc.2022.154017
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........8971bc5b8166dfc25fc9f3bb2fa71efd
قاعدة البيانات: OpenAIRE
الوصف
تدمد:01694332