In this work, we use the metal-assisted chemical etching (MACE) to produce our multi-scale surface textures, namely “Hierarchical structure”, which is combined with micropyramid and nanowires. The templates are modulated through controlling the morphology of silver cluster on the randomly distributed micro-pyramidal surface with rapid thermal annealing (RTA) and the ratio of hydrogen fluoride (HF) and hydrogen peroxide (H 2 O 2 ) during metal-assisted chemical etching. The power conversion efficiency (PCE) of new multi-structure on a hybrid solar cell can achieve 14.07 % by reducing reflectance to 3.61 % and enhancing J SC to 33.43 mA/cm2 with a 1x1 cm2 active area.
