Photon flux dependent image resolution of reflective ptychographic microscope for extreme ultraviolet actinic mask metrology
| العنوان: | Photon flux dependent image resolution of reflective ptychographic microscope for extreme ultraviolet actinic mask metrology |
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| المؤلفون: | Hyun-Su Kim, Ricarda Nebling, Atoosa Dejkameh, Tao Shen, Yasin Ekinci, Iacopo Mochi |
| المصدر: | Journal of Micro/Nanopatterning, Materials, and Metrology. 21 |
| بيانات النشر: | SPIE-Intl Soc Optical Eng, 2022. |
| سنة النشر: | 2022 |
| تدمد: | 2708-8340 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::96cb59a3dc8c69cd6ef073d672cdebf4 https://doi.org/10.1117/1.jmm.21.3.034002 |
| رقم الأكسشن: | edsair.doi...........96cb59a3dc8c69cd6ef073d672cdebf4 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 27088340 |
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