In this research, an ultrasonic-aided mechanism will be studied. This mechanism can be installed to many machines as well as utilized to assist the machining process in order to improve the machining efficiency and the machinability of brittle and hard materials. The focus of this research is the design of the compliant mechanism combined with the piezoelectric device in a vibration module. The module will include a piezo stack actuator, a flexure hinge, a control and monitoring system. The design of the flexure hinge will be optimized to derive the optimum performance. The vibration frequency and amplitude will be able to be adjusted to adapt a variety of machining processes. The results of this study will be very useful for the development of the ultrasonic-aided processes and can be a promise for further improvements and more applications in the manufacturing industry.