Visible and near-infrared ridge waveguides in fused silica glasses by oxygen ion implantation and femtosecond laser ablation
العنوان: | Visible and near-infrared ridge waveguides in fused silica glasses by oxygen ion implantation and femtosecond laser ablation |
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المؤلفون: | Chun-Xiao Liu, Wang Sun, Zi-Heng Zeng, Yan-Jun Zhou, Liao-Lin Zhang, Li-Li Fu, Qing-Yang Yue |
المصدر: | Modern Physics Letters B. 37 |
بيانات النشر: | World Scientific Pub Co Pte Ltd, 2023. |
سنة النشر: | 2023 |
مصطلحات موضوعية: | Statistical and Nonlinear Physics, Condensed Matter Physics |
الوصف: | A two-dimensional waveguide is the building block in integrated photonic circuits. In this work, the 5.0 MeV oxygen ion implantation at a dose of [Formula: see text] ions/cm2 was carried out on the fused silica glass for the formation of the planar waveguide. Then, a femtosecond laser was employed to ablate the ion-implanted surface at a speed of 200 [Formula: see text]m/s for the construction of the ridge waveguide. The energy depositions of the oxygen ion implantation into the fused silica glass were simulated by the SRIM 2013. The microscopic morphology of the ridge waveguide was photographed by a Nikon microscope. The near-field intensity distributions of the ridge waveguide at 532 nm and 976 nm were measured by using the end-face coupling system. The ion-implanted and femtosecond-ablated ridge waveguide on the fused silica glass has the potential as a photonic device for integrated optical systems at the visible and near-infrared bands. |
تدمد: | 1793-6640 0217-9849 |
URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::9d33f298e448f89a07810966c7a58d4c https://doi.org/10.1142/s0217984922502098 |
رقم الأكسشن: | edsair.doi...........9d33f298e448f89a07810966c7a58d4c |
قاعدة البيانات: | OpenAIRE |
تدمد: | 17936640 02179849 |
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