DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder
| العنوان: | DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder |
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| المؤلفون: | Haoyu Yang, Shuhe Li, Wen Chen, Piyush Pathak, Frank Gennari, Ya-Chieh Lai, Bei Yu |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing. 35:67-77 |
| بيانات النشر: | Institute of Electrical and Electronics Engineers (IEEE), 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | Electrical and Electronic Engineering, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials |
| تدمد: | 1558-2345 0894-6507 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::a59468702add79f5a629bf39d9444663 https://doi.org/10.1109/tsm.2021.3139354 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........a59468702add79f5a629bf39d9444663 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 15582345 08946507 |
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