Study of the generation of the 13.5-nm EUV radiation from Sn ions in a CO2 laser-produced plasma
| العنوان: | Study of the generation of the 13.5-nm EUV radiation from Sn ions in a CO2 laser-produced plasma |
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| المؤلفون: | V. E. Cherkovets, Yu. B. Smakovskii, A. A. Rupasov, Yu. A. Satov, G. S. Volkov, V. K. Rerikh, V. I. Zaitsev, K. N. Makarov, Anatoly P. Napartovich, A. E. Stepanov |
| المصدر: | Plasma Physics Reports. 36:129-141 |
| بيانات النشر: | Pleiades Publishing Ltd, 2010. |
| سنة النشر: | 2010 |
| مصطلحات موضوعية: | Materials science, Physics and Astronomy (miscellaneous), Extreme ultraviolet lithography, Energy conversion efficiency, Plasma, Radiation, Condensed Matter Physics, Laser, Charged particle, Ion, law.invention, law, Atomic physics, Lithography |
| الوصف: | Results are presented from experimental and theoretical studies of the efficiency of using a CO2 laser to create a high-power source of 13- to 14-nm EUV radiation for lithography. For a laser intensity of ∼2 × 1011 W/cm2, a conversion efficiency of kEUV ≃ 1.5% was achieved on a plane solid Sn target. The calculated gas dynamics and population kinetics of Sn plasma ions agree qualitatively with experimental results. |
| تدمد: | 1562-6938 1063-780X |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::a8646cc4c52a81e2b821e5743ccc4e97 https://doi.org/10.1134/s1063780x10020042 |
| حقوق: | CLOSED |
| رقم الأكسشن: | edsair.doi...........a8646cc4c52a81e2b821e5743ccc4e97 |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Springer Verlag. | تدمد: | 15626938 1063780X |
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