MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature
العنوان: | MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature |
---|---|
المؤلفون: | E. K. Baumert, Samuel Graham, B. Pant, B. L. Allen, Olivier N. Pierron, Ken Gall, Sukwon Choi |
المصدر: | Experimental Mechanics. 52:607-617 |
بيانات النشر: | Springer Science and Business Media LLC, 2011. |
سنة النشر: | 2011 |
مصطلحات موضوعية: | Microelectromechanical systems, Materials science, business.industry, Mechanical Engineering, Aerospace Engineering, Nanotechnology, Temperature measurement, Finite element method, Displacement (vector), Mechanics of Materials, Solid mechanics, Optoelectronics, business, Actuator, Nanomechanics, Tensile testing |
الوصف: | Microelectromechanical system (MEMS) devices based on electro-thermal actuation have been used over the past few years to perform tensile tests on nanomaterials. However, previous MEMS designs only allowed small (e.g. |
تدمد: | 1741-2765 0014-4851 |
URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::aa5e2855838f3ab2a3e458dfc119f024 https://doi.org/10.1007/s11340-011-9526-8 |
حقوق: | CLOSED |
رقم الأكسشن: | edsair.doi...........aa5e2855838f3ab2a3e458dfc119f024 |
قاعدة البيانات: | OpenAIRE |
تدمد: | 17412765 00144851 |
---|