Reaction kinetics control in preparation of CdTe and HgCdTe by hot wall metalorganic vapor phase epitaxy

التفاصيل البيبلوغرافية
العنوان: Reaction kinetics control in preparation of CdTe and HgCdTe by hot wall metalorganic vapor phase epitaxy
المؤلفون: Guang-Yu Wei, Rui-Wu Peng, Yong-Qing Ding
المصدر: Journal of Electronic Materials. 23:221-224
بيانات النشر: Springer Science and Business Media LLC, 1994.
سنة النشر: 1994
مصطلحات موضوعية: Solid-state physics, Chemistry, Semiconductor materials, Inorganic chemistry, Vapor phase, Analytical chemistry, Partial pressure, Condensed Matter Physics, Epitaxy, Cadmium telluride photovoltaics, Electronic, Optical and Magnetic Materials, Chemical kinetics, Materials Chemistry, Electrical and Electronic Engineering, Group 2 organometallic chemistry
الوصف: The growth rates of CdTe and HgCdTe by hot wall metalorganic vapor phase epitaxy were studied as functions of growth temperatures and partial pressures of precursors. It is suggested that the growth of CdTe and HgCdTe was controlled by reaction kinetics. The relationship between growth processes and epilayer properties was discussed and high quality epilayers were obtained.
تدمد: 1543-186X
0361-5235
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::aaf6cd0ee3c9ba894fd24267f15661ba
https://doi.org/10.1007/bf02655273
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........aaf6cd0ee3c9ba894fd24267f15661ba
قاعدة البيانات: OpenAIRE