التفاصيل البيبلوغرافية
العنوان: |
3D Stacked Nanowires CMOS Integration with a Damascene Finfet Process |
المؤلفون: |
Thomas Ernst, Simon Deleonibus, Sébastien Barnola, Erwan Dornel, Cecilia Dupre, Jean-Charles Barbe, S. Becu, Francois Andrieu, C. Vizioz, O. Faynot, Vincent Delaye, J-M. Hartmann, Gerard Ghibaudo, Thierry Poiroux |
المصدر: |
Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials. |
بيانات النشر: |
The Japan Society of Applied Physics, 2007. |
سنة النشر: |
2007 |
مصطلحات موضوعية: |
Materials science, CMOS, Copper interconnect, Nanowire, Process (computing), Nanotechnology |
URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_________::ac6c60e4a8c4f4579c2ee49a42673414 https://doi.org/10.7567/ssdm.2007.i-1-1 |
رقم الأكسشن: |
edsair.doi...........ac6c60e4a8c4f4579c2ee49a42673414 |
قاعدة البيانات: |
OpenAIRE |