التفاصيل البيبلوغرافية
| العنوان: |
New Observation of NBTI Degradation and Recovery Effect of Plasma Nitrided Oxide in Nano Scale PMOSFET’s |
| المؤلفون: |
Won-Ho Choi, Min-Ki Na, Tae-Gyu Goo, Dae-Byung Kim, Hee-Hwan Ji, Yong-Goo Kim, Hi-Deok Lee, Young-Seok Kang, Ga-Won Lee, Heui-Seung Lee, Ook-Sang You, In-Shik Han, Sung-Hyung Park |
| المصدر: |
Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials. |
| بيانات النشر: |
The Japan Society of Applied Physics, 2007. |
| سنة النشر: |
2007 |
| مصطلحات موضوعية: |
chemistry.chemical_compound, Recovery effect, Materials science, Chemical engineering, chemistry, Oxide, Degradation (geology), Plasma, Nanoscopic scale, Nitriding |
| URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_________::bbcad02fada2fce9f9e32d88c145e480
https://doi.org/10.7567/ssdm.2007.p-3-14 |
| رقم الأكسشن: |
edsair.doi...........bbcad02fada2fce9f9e32d88c145e480 |
| قاعدة البيانات: |
OpenAIRE |
