Measurement and Modeling of Adhesion Energy Between Two Rough Microelectromechanical System (MEMS) Surfaces
| العنوان: | Measurement and Modeling of Adhesion Energy Between Two Rough Microelectromechanical System (MEMS) Surfaces |
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| المؤلفون: | Andreas A. Polycarpou, Leslie M. Phinney, Xiaojie Xue |
| المصدر: | Journal of Adhesion Science and Technology. 22:429-455 |
| بيانات النشر: | Informa UK Limited, 2008. |
| سنة النشر: | 2008 |
| مصطلحات موضوعية: | Microelectromechanical systems, Materials science, business.industry, Capillary action, Surfaces and Interfaces, General Chemistry, Adhesion, Surface finish, Surfaces, Coatings and Films, Optics, Mechanics of Materials, Materials Chemistry, Surface roughness, Relative humidity, Composite material, business, Beam (structure), Asperity (materials science) |
| الوصف: | Adhesion failure is a significant reliability concern and a major barrier to commercializing MEMS devices. In this paper, a beam-peel-based experimental setup was improved to measure the adhesion energy between a microcantilever and a substrate at different humidity levels. The microcantilever arrays were separated from the substrate and their fixed ends were directly attached to a piezoactuator to control the beam displacement with sub-nanometer accuracy. The experimental setup was sealed in a chamber with precise humidity control. An in situ interferometer was used to measure the beam deflection and crack length during the peel test. To examine the effects of surface roughness and relative humidity on adhesion energy, four different surface pairs were measured at humidity levels ranging from 40 to 92%. Before testing, the microcantilevers and substrates were scanned using an Atomic Force Microscope. Surface roughness parameters and the exact probability density function of the asperity heights were extr... |
| تدمد: | 1568-5616 0169-4243 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::c40e6b778265afbcd9c9e5cfdecbc26d https://doi.org/10.1163/156856108x305570 |
| رقم الأكسشن: | edsair.doi...........c40e6b778265afbcd9c9e5cfdecbc26d |
| قاعدة البيانات: | OpenAIRE |
PDF full text from Publisher | تدمد: | 15685616 01694243 |
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