Laser ion source for semiconductor applications
| العنوان: | Laser ion source for semiconductor applications |
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| المؤلفون: | T V Kulevoy, A A Losev, P N Alekseev, Yu A Satov, A V Shumshurov, P B Lagov, M E Letovaltseva, S A Zinoviev |
| المصدر: | Journal of Physics: Conference Series. 2244:012096 |
| بيانات النشر: | IOP Publishing, 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | History, Computer Science Applications, Education |
| الوصف: | Carbon implantation can be effectively used for axial minority charge carriers’ lifetime control in various silicon bulk and epitaxial planar structures. When carbon is implanted, more stable recombination centres are formed and silicon is not doped with additional impurities, as for example, when irradiated with protons or helium ions. Economically, such a process competes with alternative methods, and is more efficient for obtaining small lifetimes (several nanoseconds). I-3 ion injector with laser-plasma ion source at Institute for theoretical and experimental physics (ITEP) is used as ion implanter in semiconductors. The ion source uses pulsed CO2 laser setup with radiation-flux density of 1011 W/cm2 at target surface. The ion source produces beams of various ions from solid targets. The generated ion beam is accelerated in the two gap RF resonator at voltage of up to 2 MV per gap. Resulting beam energy is up to 4 MV per charge. Parameters of carbon ion beam generated and used for semiconductor samples irradiation during experiments for axial minority charge carriers lifetime control in various silicon bulk and epitaxial planar structures are presented. |
| تدمد: | 1742-6596 1742-6588 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::c5b84ef09f8a9ff8a4c7e9bdc6876f13 https://doi.org/10.1088/1742-6596/2244/1/012096 |
| حقوق: | OPEN |
| رقم الأكسشن: | edsair.doi...........c5b84ef09f8a9ff8a4c7e9bdc6876f13 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 17426596 17426588 |
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