Fast Trajectory Tracking of a Flexure-Based, Multiaxis Nanopositioner With 50-mm Travel
| العنوان: | Fast Trajectory Tracking of a Flexure-Based, Multiaxis Nanopositioner With 50-mm Travel |
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| المؤلفون: | Nilabh K. Roy, Michael Cullinan |
| المصدر: | IEEE/ASME Transactions on Mechatronics. 23:2805-2813 |
| بيانات النشر: | Institute of Electrical and Electronics Engineers (IEEE), 2018. |
| سنة النشر: | 2018 |
| مصطلحات موضوعية: | 0209 industrial biotechnology, Positioning system, Settling time, Computer science, Bandwidth (signal processing), 02 engineering and technology, Linear-quadratic regulator, Finite horizon, 021001 nanoscience & nanotechnology, Manufacturing systems, Computer Science Applications, law.invention, Selective laser sintering, 020901 industrial engineering & automation, Control and Systems Engineering, law, Control theory, Electrical and Electronic Engineering, 0210 nano-technology, Microscale chemistry |
| الوصف: | The precise, high-speed control of nanopositioning stages is critical for many microscale additive manufacturing systems, such as microscale selective laser sintering (μ-SLS), where high throughput is needed. In μ-SLS, the positioning stage requires achieving 10 Hz steps with sub-100 nm accuracy and a travel range of 50 mm. The open-loop resolution and settling time of the flexure stage presented in the study are found to be 63 nm and 1.27 s, respectively. This settling time is too large for its application in high-throughput μ-SLS. To improve the tracking performance of the stage for fast varying signals up to 10 Hz and achieve better resolution, this paper presents the design of a finite horizon linear quadratic regulator controller for the XY stage. Owing to the good damping properties of the controller, the resolution is improved to 8 nm and input signals with 10-Hz frequency are effectively tracked. With the addition of a resonant shifting control, the tracking bandwidth is improved to 23 Hz. The paper presents a unique combination of low cost, large travel, sub-10 nm resolution and high-bandwidth XY positioning system, which is not to be found in either off-the-shelf nanopositioning stages or in research laboratories. |
| تدمد: | 1941-014X 1083-4435 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::caa8430e6f52a27fe36ee18465a2f3b8 https://doi.org/10.1109/tmech.2018.2871162 |
| حقوق: | OPEN |
| رقم الأكسشن: | edsair.doi...........caa8430e6f52a27fe36ee18465a2f3b8 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 1941014X 10834435 |
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