Thin film of yttria stabilized zirconia (YSZ) was prepared on alumina substrates by applying an electron beam physical vapor deposition (EB-PVD) method. The morphology and deposition behavior of the coating layer were investigated using atomic force microscope, secondary electron microscope, and X-ray diffractometer. The electrical conductivity of the YSZ coating layer was also evaluated. The fracture microstructure of YSZ electrolyte film, which was deposited with thickness of 10 μm, has showed a columnar structure. Also, the activation energy of the coating layer was similar to that of bulk YSZ.
