Systematic methods to identify and verify non-visible defects in silicon substrate

التفاصيل البيبلوغرافية
العنوان: Systematic methods to identify and verify non-visible defects in silicon substrate
المؤلفون: Hongwei Huang, Candy Liu, Clieve Dai, Pinglung Liao, Wei Xu, Winnie Wei, Luke Wu, J. J. Xin
المصدر: Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
بيانات النشر: IEEE, 2014.
سنة النشر: 2014
مصطلحات موضوعية: Materials science, Silicon, chemistry, business.industry, Electronic engineering, chemistry.chemical_element, Optoelectronics, Substrate (printing), business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d67f0b98c39a2e02efa2be102d6be7a3
https://doi.org/10.1109/ipfa.2014.6898133
رقم الأكسشن: edsair.doi...........d67f0b98c39a2e02efa2be102d6be7a3
قاعدة البيانات: OpenAIRE