التفاصيل البيبلوغرافية
العنوان:
ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows
المؤلفون:
Lars Jensen , Istvan Balasa , Gerald Philip Cox , Jue Wang
المصدر:
Frontiers in Optics / Laser Science .
بيانات النشر:
Optica Publishing Group, 2020.
سنة النشر:
2020
مصطلحات موضوعية:
Fabrication , Materials science , business.industry , chemistry.chemical_element , 02 engineering and technology , 021001 nanoscience & nanotechnology , Laser , 01 natural sciences , Fluence , Laser optics , law.invention , 010309 optics , chemistry , law , Attenuation coefficient , 0103 physical sciences , Fluorine , Optoelectronics , Microelectronics , 0210 nano-technology , Absorption (electromagnetic radiation) , business
الوصف:
High throughput of microelectronic fabrication demands high performance CaF2 laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF2 windows.
URL الوصول:
https://explore.openaire.eu/search/publication?articleId=doi_________::d6b046b4605433498645068540ea9317 https://doi.org/10.1364/fio.2020.ftu2c.3
رقم الأكسشن:
edsair.doi...........d6b046b4605433498645068540ea9317
قاعدة البيانات:
OpenAIRE
