International Symposium for Testing and Failure Analysis.
بيانات النشر:
ASM International, 2022.
سنة النشر:
2022
الوصف:
Automated TEM lamella preparation using the remote CAD to SEM image alignment has been demonstrated for high volume failure analysis. The proposed method not only provides a secure means of using CAD design data during the lamella prep process, but offers an improved flexibility compared to conventional methods of processing CAD design file in a tool environment. The experiment showed that the new method is 3.1 times higher in throughput and requires 74 times less manhours, compared to manual process.
