Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures

التفاصيل البيبلوغرافية
العنوان: Plasma etching of cavities into diamond anvils for experiments at high pressures and high temperatures
المؤلفون: Hyunchae Cynn, William J. Evans, Sam Weir, Chantel Aracne-Ruddle, Yogesh K. Vohra, Daniel L. Farber, S. Falabella
المصدر: High Pressure Research. 31:191-198
بيانات النشر: Informa UK Limited, 2011.
سنة النشر: 2011
مصطلحات موضوعية: Materials science, Plasma etching, business.industry, fungi, technology, industry, and agriculture, Diamond, chemistry.chemical_element, macromolecular substances, Plasma, engineering.material, Tungsten, Condensed Matter Physics, Laser, law.invention, stomatognathic system, chemistry, law, Etching (microfabrication), Thermal insulation, parasitic diseases, engineering, Optoelectronics, business, Lithography
الوصف: We describe a method for precisely etching small cavities into the culets of diamond anvils for the purpose of providing thermal insulation for samples in experiments at high pressures and high temperatures. The cavities were fabricated using highly directional oxygen plasma to reactively etch into the diamond surface. The lateral extent of the etch was precisely controlled to micron accuracy by etching the diamond through a lithographically fabricated tungsten mask. The performance of the etched cavities in high-temperature experiments in which the samples were either laser heated or electrically heated is discussed.
تدمد: 1477-2299
0895-7959
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e1e9ea23a52d9e2056a63657658d4aa6
https://doi.org/10.1080/08957959.2011.557073
حقوق: OPEN
رقم الأكسشن: edsair.doi...........e1e9ea23a52d9e2056a63657658d4aa6
قاعدة البيانات: OpenAIRE