Effects of In/Zn composition on the Performance of Ultra-thin Atomic Layer Deposited InxZnl-xO Channel Thin-Film Transistors

التفاصيل البيبلوغرافية
العنوان: Effects of In/Zn composition on the Performance of Ultra-thin Atomic Layer Deposited InxZnl-xO Channel Thin-Film Transistors
المؤلفون: Yan-Kui Liang, June-Yang Zheng, Jing-Wei Lin, Yi Miao Hua, Tsung-Te Chou, Chun-Chieh Lu, Huai-Ying Huang, Yu-Ming Lin, Chi-Chung Kei, Edward-Yi Chang, Chun-Hsiung Lin
المصدر: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
بيانات النشر: IEEE, 2023.
سنة النشر: 2023
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e4ba8a2214de2f194321652396483658
https://doi.org/10.1109/edtm55494.2023.10103052
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........e4ba8a2214de2f194321652396483658
قاعدة البيانات: OpenAIRE