التفاصيل البيبلوغرافية
| العنوان: |
P-75: Advanced Halftone Photolithography Using Four-Mask Process Architecture for G8.6 TFT-LCDs |
| المؤلفون: |
An-Thung Cho, James Hsu, Jeff Zhou, Jinn Hong, Feng-yun Yang, Yan-mei Luo, Yi-qun Tian, Dan Lei, Zhen Liu, Qiong-hua Mo, Kai-jun Liu, Bang-tong Ge, Feng-xiang Long, Ting-ting Fu, Min Li, Wade Chen, York Lu |
| المصدر: |
SID Symposium Digest of Technical Papers. 49:1471-1474 |
| بيانات النشر: |
Wiley, 2018. |
| سنة النشر: |
2018 |
| مصطلحات موضوعية: |
010302 applied physics, 0103 physical sciences, 02 engineering and technology, 021001 nanoscience & nanotechnology, 0210 nano-technology, 01 natural sciences |
| تدمد: |
0097-966X |
| URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_________::e594d3a35adc30a4d7156b77ad022007
https://doi.org/10.1002/sdtp.12240 |
| حقوق: |
CLOSED |
| رقم الأكسشن: |
edsair.doi...........e594d3a35adc30a4d7156b77ad022007 |
| قاعدة البيانات: |
OpenAIRE |
