The direct injection of liquid droplets into low pressure plasmas
| العنوان: | The direct injection of liquid droplets into low pressure plasmas |
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| المؤلفون: | Matthew Goeckner, A. Sra, Daisuke Ogawa, Lawrence J. Overzet, Richard B. Timmons, Iqbal Saraf |
| المصدر: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 27:342-351 |
| بيانات النشر: | American Vacuum Society, 2009. |
| سنة النشر: | 2009 |
| مصطلحات موضوعية: | Hybrid physical-chemical vapor deposition, Vapor pressure, Chemistry, technology, industry, and agriculture, Evaporation, Analytical chemistry, food and beverages, Atmospheric-pressure plasma, Surfaces and Interfaces, Chemical vapor deposition, Condensed Matter Physics, complex mixtures, Surfaces, Coatings and Films, Plasma-enhanced chemical vapor deposition, Sublimation (phase transition), Thin film |
| الوصف: | A much greater number of useful precursors for plasma-enhanced chemical vapor deposition (PECVD) can be dispersed in high vapor pressure solvents than can be put into the vapor phase directly. In order to enable the use of such precursors, the authors investigated a method by which one can directly inject these liquids as microdroplets into low pressure PECVD environments. The solvent evaporates first leaving behind the desired precursor in the gas/plasma. The plasma dissociates the vapor and causes the deposition of a composite film (from precursor, solvent, and plasma gas). The authors made preliminary tests using Fe nanoparticles in hexane and were able to incorporate over 4% Fe in the resulting thin films. In addition, the authors simulated the process. The time required for a droplet to fully evaporate is a function of the background pressure, initial liquid temperature, droplet-vapor interactions, and initial droplet size. A typical evaporation time for a 50μm diameter droplet of hexane is ∼3s witho... |
| تدمد: | 1520-8559 0734-2101 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::e8895feb15c7ff290b93cea10379c9cc https://doi.org/10.1116/1.3081965 |
| رقم الأكسشن: | edsair.doi...........e8895feb15c7ff290b93cea10379c9cc |
| قاعدة البيانات: | OpenAIRE |
Find this article in full text from Scitation. | تدمد: | 15208559 07342101 |
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