Interferometrical profilometer for high precision 3D measurements of free-form optics topography with large local slopes

التفاصيل البيبلوغرافية
العنوان: Interferometrical profilometer for high precision 3D measurements of free-form optics topography with large local slopes
المؤلفون: Michael Kühnel, Ilko Rahneberg, Denis Dontsov, Christoph Braig, Alexei Erko, Jürgen Probst, Thomas Krist, Enrico Langlotz
المصدر: Eighth European Seminar on Precision Optics Manufacturing.
بيانات النشر: SPIE, 2021.
سنة النشر: 2021
مصطلحات موضوعية: Materials science, Optics, business.industry, Free form, Profilometer, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ec1761e37dee1d8c9563de394dd1330e
https://doi.org/10.1117/12.2593700
رقم الأكسشن: edsair.doi...........ec1761e37dee1d8c9563de394dd1330e
قاعدة البيانات: OpenAIRE