Effect of gravitational strength on nucleation phenomena of electrodeposited copper onto a TiN substrate

التفاصيل البيبلوغرافية
العنوان: Effect of gravitational strength on nucleation phenomena of electrodeposited copper onto a TiN substrate
المؤلفون: Kazuhiko Kuribayashi, Eishi Kusaka, M. Morisue, Ryuji Ishii, Yasuhiro Fukunaka
المصدر: Journal of Electroanalytical Chemistry. 559:155-163
بيانات النشر: Elsevier BV, 2003.
سنة النشر: 2003
مصطلحات موضوعية: Electrolytic cell, General Chemical Engineering, Metallurgy, Analytical chemistry, Nucleation, chemistry.chemical_element, Overpotential, Copper, Cathode, Analytical Chemistry, Ion, law.invention, Anode, chemistry, law, Electrochemistry, Tin
الوصف: Cu 2+ ion was electrodeposited potentiostatically in 0.05 M CuSO 4 aqueous solutions onto a foreign substrate of TiN film sputtered on a stainless steel sheet. The amount of electricity was limited to 31.8 mC cm −2 , which corresponds to a 10 nm thick film, deposited uniformly without any void formation. Two different electrolytic cell configurations were designed in order to discuss quantitatively the effect of gravitational strength on the nucleation and growth of metal electrodeposition in detail: (a) a horizontal cathode surface facing downward over an anode (C/A) and (2) an anode over cathode (A/C). SEM pictures show that the nucleus number density varies from 10 7 to 10 10 cm −2 depending on the negative overpotential and that the A/C configuration introduces more number of nuclei than the case of C/A at a constant overpotential. The gravitational level certainly influences the initial stage of electrodeposition of Cu 2+ ion in CuSO 4 aqueous solution. Image analysis techniques further demonstrate that copper metal does not nucleate randomly over the TiN substrate, but the presence of a nucleation inhibition or exclusion zone was suggested. Thus, the growth rate of the inhibited zone should be influenced by the gravitational field vector.
تدمد: 1572-6657
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::efc929e4fc8c8d44c5502b4cb63f25ae
https://doi.org/10.1016/j.jelechem.2003.08.021
حقوق: CLOSED
رقم الأكسشن: edsair.doi...........efc929e4fc8c8d44c5502b4cb63f25ae
قاعدة البيانات: OpenAIRE