A CMOS-based ion-sensitive field-effect transistor (ISFET) is designed, fabricated, and validated as a biosensor for protein diagnosis. Utilizing 180 nm foundry process, this work experimentally demonstrates the developed dual-gated ISFET biosensor array (128 by 128 devices) has capabilities to obtain statistical measurements of pH. Furthermore, it can be used to detect several specific biomarkers, i.e. cTnI, HbA1c and HBV-DNA, for cardiac diseases, diabetes and hepatitis B respectively. This work shows benefits of the nano-scale ISFET array for biosensing applications.
