The oscillating temperature technique was successfully employed to grow large and composition homogeneous CaFeAsF single crystals due to the reduction of nuclei number by temperature oscillation. The largest as-grown CaFeAsF single crystal was nearly 8 mm in lateral size and 0.27 mm in thickness which is far larger than previously reported in all dimensions. The full-width-at-half maximum (FWHM) of x-ray rocking curve is as small as 0.163{\deg} indicating the high quality of CaFeAsF single crystals.
