In this paper an efficient and reliable method for stochastic yield estimation is presented. Since one main challenge of uncertainty quantification is the computational feasibility, we propose a hybrid approach where most of the Monte Carlo sample points are evaluated with a surrogate model, and only a few sample points are reevaluated with the original high fidelity model. Gaussian process regression is a non-intrusive method which is used to build the surrogate model. Without many prerequisites, this gives us not only an approximation of the function value, but also an error indicator that we can use to decide whether a sample point should be reevaluated or not. For two benchmark problems, a dielectrical waveguide and a lowpass filter, the proposed methods outperform classic approaches.
