The up-scaling of laser micromachining processes with ultrashort pulses is limited due to heat accumulation and shielding effects. Multi beam scanning represents one of the strategies to overcome this drawback. It is in general realized by combining a diffractive beam splitter with a galvanometer scanner. A full synchronization with the laser repetition rate offers new possibilities with minimum thermal impact. We will demonstrate this by means of a multipulse-drilling on the fly process with a regular 5x5 spot pattern having a spot to spot spacing of 160µm. At a repetition rate of 100 kHz and an average power of 16 W we were able to drill more than 2’300 holes/s in a 10µm thick steel foil. We have further extended this technology with a special light modulator for different periodic spot patterns and more complex intensity distributions.
