We present a simple and systematic synthesis method of Zn doped TiO2 (Zn/TiO2) that is usually prepared with sophisticated preparation procedures. Zn/TiO2 have been synthesized following a facile and efficient incipient wet impregnation method. The resulting Zn/TiO2 has been characterized by X-ray diffraction, scanning electron microscopy, and energy-dispersive X-ray spectroscopy, which revealed the successful formation of the anatase phase and traces of the rutile phase. The existence of the rutile phase in smaller proportion was a clear sign of the Zn doping induced anatase-to-rutile phase transition. Sensible enhancement in the dielectric constant due to Zn addition has also been observed from experiment and approximate first-principle calculation. Thus, our results have significant impact on TiO2 based semiconductor technology.
