Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis
| العنوان: | Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis |
|---|---|
| المؤلفون: | El Fissi, L., Friedt, J.-M., Cherioux, F., Luzet, D., Ballandras, S. |
| المساهمون: | Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Senseor (SENSEOR), Senseor |
| المصدر: | SENSORS AND ACTUATORS A-PHYSICAL 23rd Eurosensors Conference 23rd Eurosensors Conference, Sep 2009, Lausanne, Switzerland. pp.304-309, ⟨10.1016/j.sna.2010.01.027⟩ Sensors and Actuators A: Physical Sensors and Actuators A: Physical, Elsevier, 2010, 162 (2), pp.304-309. ⟨10.1016/j.sna.2010.01.027⟩ |
| بيانات النشر: | HAL CCSD, 2009. |
| سنة النشر: | 2009 |
| مصطلحات موضوعية: | [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph], [PHYS.PHYS.PHYS-ATOM-PH]Physics [physics]/Physics [physics]/Atomic Physics [physics.atom-ph], [CHIM.ORGA]Chemical Sciences/Organic chemistry, 010401 analytical chemistry, Metals and Alloys, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, [SPI.MAT]Engineering Sciences [physics]/Materials, Hardware_INTEGRATEDCIRCUITS, [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic, [PHYS.PHYS.PHYS-CHEM-PH]Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph], Electrical and Electronic Engineering, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, 0210 nano-technology, Instrumentation |
| الوصف: | International audience; Sensors able to operate with liquid phases are the key-point for the development of biochemical lab-on-chip devices. In this work, we present the design and manufacture of Love-wave sensors equipped with a liquid cell, at the wafer scale level, to allow operation with liquid media. Love-wave sensors are fabricated on AT-cut quartz plates (IEEE Std-176 notation (YXlt)/36/90) and passivated by a 2.5 mu m thick silica overlay. The fabrication process using the celebrated SU-8 epoxy-based photoresist combined with silicon or quartz machined covers is presented, revealing robust enough for ensuring a reproducible sensor fabrication and packaging. Results are reported emphasizing the efficiency of the proposed approach |
| اللغة: | English |
| تدمد: | 0924-4247 1873-3069 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6d69354a425bfeba7422a8647e3b68ce https://hal.archives-ouvertes.fr/hal-00533126 |
| حقوق: | OPEN |
| رقم الأكسشن: | edsair.doi.dedup.....6d69354a425bfeba7422a8647e3b68ce |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 09244247 18733069 |
|---|