Impact of output metric on the resolution of mode-localized MEMS resonant sensors
| العنوان: | Impact of output metric on the resolution of mode-localized MEMS resonant sensors |
|---|---|
| المؤلفون: | Nuria Barniol, Jerome Juillard, P. Maris Ferreira, Pierre Prache |
| المساهمون: | Laboratoire Génie électrique et électronique de Paris (GeePs), Université Paris-Sud - Paris 11 (UP11)-Université Pierre et Marie Curie - Paris 6 (UPMC)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS), Electronics Engineering Department, Universitat Autònoma de Barcelona (UAB), Centre National de la Recherche Scientifique (CNRS)-CentraleSupélec-Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris-Sud - Paris 11 (UP11) |
| المصدر: | Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2017 Joint Conference of the European, Jul 2017, Besancon, France. ⟨10.1109/fcs.2017.8088943⟩ |
| بيانات النشر: | HAL CCSD, 2017. |
| سنة النشر: | 2017 |
| مصطلحات موضوعية: | thermomechanical noise, Acoustics, coupling coefficient, 02 engineering and technology, 01 natural sciences, Noise (electronics), Resonator, Electronic engineering, Sensitivity (control systems), output metric, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Microelectromechanical systems, Physics, 010401 analytical chemistry, Resolution (electron density), 021001 nanoscience & nanotechnology, coupling strength, 0104 chemical sciences, [SPI.TRON]Engineering Sciences [physics]/Electronics, resonant sensing architectures, mode-localized MEMS resonant sensors, Metric (mathematics), Transient (oscillation), 0210 nano-technology, Coupling coefficient of resonators, sensor resolution, weakly-coupled resonators |
| الوصف: | International audience; In this paper, we investigate how additive noise, e.g. thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two weakly-coupled resonators. Existing work suggests that the resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold when the ratio of the motional amplitudes of the resonators is used as an output metric, and that, in this case, the sensor resolution is actually independent of the coupling strength. We then extend our proof, supported by transient simulations of a simple model, to other output metrics. |
| اللغة: | English |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8469e863496bb19d6e3e2996e760a6ca https://hal.archives-ouvertes.fr/hal-01657114 |
| رقم الأكسشن: | edsair.doi.dedup.....8469e863496bb19d6e3e2996e760a6ca |
| قاعدة البيانات: | OpenAIRE |
| الوصف غير متاح. |