Selective seed layer patterning of PVD metal stacks by electrochemical screen printing for solar cell applications

التفاصيل البيبلوغرافية
العنوان: Selective seed layer patterning of PVD metal stacks by electrochemical screen printing for solar cell applications
المؤلفون: Sebastian Bechmann, Jonas Eckert, Raphael Efinger, Gabriele Mikolasch, Jonas Bartsch, Ralf Weber, Mathias Kamp, Katharina Gensowski
المساهمون: Publica
سنة النشر: 2020
مصطلحات موضوعية: Materials science, Silicon, 020209 energy, chemistry.chemical_element, 02 engineering and technology, Electrochemistry, 7. Clean energy, law.invention, Metal, law, Plating, Solar cell, 0202 electrical engineering, electronic engineering, information engineering, Electrical and Electronic Engineering, Electrochemical etching, Renewable Energy, Sustainability and the Environment, business.industry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Silicium-Photovoltaik, chemistry, visual_art, Photovoltaik, Screen printing, visual_art.visual_art_medium, Optoelectronics, 0210 nano-technology, business, Layer (electronics), Metallisierung und Strukturierung
الوصف: A proof of principle for electrochemical screen printing (ESP) as a patterning process for thin metal stacks that can be employed, eg, in interdigitated back contact (IBC) or silicon heterojunction (SHJ) solar cells, is demonstrated. By using the ESP process, a 125 × 125‐mm2 interdigitated back contact grid was successfully patterned into a100‐nm physical vapor deposited (PVD) aluminum layer. Optimizations of the ESP process were performed to improve the patterning resolution. Rectangular trenches with a mean width of 36 ± 5 mm could be demonstrated on a 100‐nm-thick aluminum layer. Up to now, ESP can be applied to PVD aluminum, copper, or stacks of both materials. Finally, metal stacks of aluminum and copper were structured, which allow a more homogeneous current distribution for the ESP process and additionally for the subsequent copper electroplating because of the second metal layer underneath the layer to be structured. The successful transfer from wafer substrate to polymer foils increases the application options of ESP technology enormously, where the topography of the surface to be structured affects the printing results.
وصف الملف: application/pdf
اللغة: English
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::905c8f3e1546110e98724145b29a8391
https://publica.fraunhofer.de/handle/publica/261291
حقوق: OPEN
رقم الأكسشن: edsair.doi.dedup.....905c8f3e1546110e98724145b29a8391
قاعدة البيانات: OpenAIRE