Remote Oxygen Scavenging of the Interfacial Oxide Layer in Ferroelectric Hafnium–Zirconium Oxide-Based Metal–Oxide–Semiconductor Structures

التفاصيل البيبلوغرافية
العنوان: Remote Oxygen Scavenging of the Interfacial Oxide Layer in Ferroelectric Hafnium–Zirconium Oxide-Based Metal–Oxide–Semiconductor Structures
المؤلفون: Nujhat Tasneem, Harshil Kashyap, Kisung Chae, Chinsung Park, Ping-che Lee, Sarah F Lombardo, Nashrah Afroze, Mengkun Tian, Harish Kumarasubramanian, Jae Hur, Hang Chen, Winston Chern, Shimeng Yu, Prabhakar Bandaru, Jayakanth Ravichandran, Kyeongjae Cho, Josh Kacher, Andrew C. Kummel, Asif Islam Khan
المصدر: ACS Applied Materials & Interfaces. 14:43897-43906
بيانات النشر: American Chemical Society (ACS), 2022.
سنة النشر: 2022
مصطلحات موضوعية: General Materials Science
الوصف: Discovery of ferroelectricity in HfO
تدمد: 1944-8252
1944-8244
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a324e2945840f490ca258809f213e785
https://doi.org/10.1021/acsami.2c11736
حقوق: CLOSED
رقم الأكسشن: edsair.doi.dedup.....a324e2945840f490ca258809f213e785
قاعدة البيانات: OpenAIRE