التفاصيل البيبلوغرافية
| العنوان: |
In-situ Ar plasma treatment as a low thermal budget technique for high performance InGaSnO thin film transistors fabricated using magnetron sputtering |
| المؤلفون: |
Mengzhen Hu, Lei Xu, Xinnan Zhang, Zengcai Song, Shijun Luo |
| المصدر: |
Applied Surface Science. 604:154621 |
| بيانات النشر: |
Elsevier BV, 2022. |
| سنة النشر: |
2022 |
| مصطلحات موضوعية: |
History, Polymers and Plastics, General Physics and Astronomy, Surfaces and Interfaces, General Chemistry, Business and International Management, Condensed Matter Physics, Industrial and Manufacturing Engineering, Surfaces, Coatings and Films |
| تدمد: |
0169-4332 |
| URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ba7499285a3995b9136556ee713d1c76
https://doi.org/10.1016/j.apsusc.2022.154621 |
| حقوق: |
CLOSED |
| رقم الأكسشن: |
edsair.doi.dedup.....ba7499285a3995b9136556ee713d1c76 |
| قاعدة البيانات: |
OpenAIRE |
