تقرير
A novel method for fatigue testing of MEMS devices containing movable elements
| العنوان: | A novel method for fatigue testing of MEMS devices containing movable elements |
|---|---|
| المؤلفون: | Szucs, Z., Rencz, M. |
| المصدر: | Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007) |
| سنة النشر: | 2008 |
| المجموعة: | Computer Science |
| مصطلحات موضوعية: | Computer Science - Other Computer Science |
| الوصف: | In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating a signal that is a function of the input voltage and capacitive ratio. The proposed circuit can be used to actuate and to sense position of an electrostatic MEMS actuator without extra sensing elements. This approach is compatible with the requirements of most analog feedback systems and the circuit topology of pulsed digital oscillators (PDO). Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing) |
| نوع الوثيقة: | Working Paper |
| URL الوصول: | http://arxiv.org/abs/0802.3091 |
| رقم الأكسشن: | edsarx.0802.3091 |
| قاعدة البيانات: | arXiv |
| الوصف غير متاح. |