تقرير
Quantum Electromechanics on Silicon Nitride Nanomembranes
| العنوان: | Quantum Electromechanics on Silicon Nitride Nanomembranes |
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| المؤلفون: | Fink, Johannes M., Kalaee, Mahmoud, Pitanti, Alessandro, Norte, Richard, Heinzle, Lukas, Davanco, Marcelo, Srinivasan, Kartik, Painter, Oskar |
| سنة النشر: | 2015 |
| المجموعة: | Condensed Matter Quantum Physics |
| مصطلحات موضوعية: | Condensed Matter - Mesoscale and Nanoscale Physics, Quantum Physics |
| الوصف: | We present a platform based upon silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Utilizing tensile stress and lithographic patterning of a silicon nitride nanomembrane we are able to reliably realize planar capacitors with vacuum gap sizes down to $s \approx 80$nm. In combination with spiral inductor coils of micron pitch, this yields microwave ($\approx 8$GHz) resonant circuits of high impedance ($Z_{0} \approx 3.4$k$\Omega$) suitable for efficient electromechanical coupling to nanoscale acoustic structures. We measure an electromechanical vacuum coupling rate of $g_{0}/2\pi = 41.5$~Hz to the low frequency ($4.48$MHz) global beam motion of a patterned phononic crystal nanobeam, and through parametric microwave driving reach a backaction cooled mechanical mode occupancy as low as $n_{m} = 0.58$. Comment: 21 pages, 9 figures |
| نوع الوثيقة: | Working Paper |
| DOI: | 10.1038/ncomms12396 |
| URL الوصول: | http://arxiv.org/abs/1512.04660 |
| رقم الأكسشن: | edsarx.1512.04660 |
| قاعدة البيانات: | arXiv |
| DOI: | 10.1038/ncomms12396 |
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