تقرير
A self-aligned nano-fabrication process for vertical NbN-MgO-NbN Josephson junctions
| العنوان: | A self-aligned nano-fabrication process for vertical NbN-MgO-NbN Josephson junctions |
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| المؤلفون: | Grimm, A., Jebari, S., Hazra, D., Blanchet, F., Gustavo, F., Thomassin, J. -L., Hofheinz, M. |
| المصدر: | Supercond. Sci. Technol. 30, 105002 (2017) |
| سنة النشر: | 2017 |
| المجموعة: | Condensed Matter |
| مصطلحات موضوعية: | Condensed Matter - Mesoscale and Nanoscale Physics, Condensed Matter - Superconductivity |
| الوصف: | We present a new process for fabricating vertical NbN-MgO-NbN Josephson junctions using self-aligned silicon nitride spacers. It allows for a wide range of junction areas from 0.02 um^2 to several 100 um^2. At the same time, it is suited for the implementation of complex microwave circuits with transmission line impedances ranging from < 1 Ohm to > 1 kOhm. The constituent thin films and the finished junctions are characterized. The latter are shown to have high gap voltages (> 4 mV) and low sub-gap leakage currents. Comment: 5 pages, 3 figures, 3 tables |
| نوع الوثيقة: | Working Paper |
| DOI: | 10.1088/1361-6668/aa8007 |
| URL الوصول: | http://arxiv.org/abs/1705.05608 |
| رقم الأكسشن: | edsarx.1705.05608 |
| قاعدة البيانات: | arXiv |
| DOI: | 10.1088/1361-6668/aa8007 |
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