Silicon nitride metalenses for unpolarized high-NA visible imaging

التفاصيل البيبلوغرافية
العنوان: Silicon nitride metalenses for unpolarized high-NA visible imaging
المؤلفون: Fan, Zhi-Bin, Shao, Zeng-Kai, Xie, Ming-Yuan, Pang, Xiao-Ning, Ruan, Wen-Sheng, Zhao, Fu-Li, Chen, Yu-Jie, Yu, Si-Yuan, Dong, Jian-Wen
المصدر: Phys. Rev. Applied 10, 014005 (2018)
سنة النشر: 2017
المجموعة: Physics (Other)
مصطلحات موضوعية: Physics - Optics
الوصف: As one of nanoscale planar structures, metasurface has shown excellent superiorities on manipulating light intensity, phase and/or polarization with specially designed nanoposts pattern. It allows to miniature a bulky optical lens into the chip-size metalens with wavelength-order thickness, playing an unprecedented role in visible imaging systems (e.g. ultrawide-angle lens and telephoto). However, a CMOS-compatible metalens has yet to be achieved in the visible region due to the limitation on material properties such as transmission and compatibility. Here, we experimentally demonstrate a divergent metalens based on silicon nitride platform with large numerical aperture (NA~0.98) and high transmission (~0.8) for unpolarized visible light, fabricated by a 695-nm-thick hexagonal silicon nitride array with a minimum space of 42 nm between adjacent nanoposts. Nearly diffraction-limit virtual focus spots are achieved within the visible region. Such metalens enables to shrink objects into a micro-scale size field of view as small as a single-mode fiber core. Furthermore, a macroscopic metalens with 1-cm-diameter is also realized including over half billion nanoposts, showing a potential application of wide viewing-angle functionality. Thanks to the high-transmission and CMOS-compatibility of silicon nitride, our findings may open a new door for the miniaturization of optical lenses in the fields of optical fibers, microendoscopes, smart phones, aerial cameras, beam shaping, and other integrated on-chip devices.
Comment: 16 pages, 7 figures
نوع الوثيقة: Working Paper
DOI: 10.1103/PhysRevApplied.10.014005
URL الوصول: http://arxiv.org/abs/1709.00573
رقم الأكسشن: edsarx.1709.00573
قاعدة البيانات: arXiv
الوصف
DOI:10.1103/PhysRevApplied.10.014005