تقرير
Dopant Precursor Adsorption into Single-Dimer Windows: Towards Guided Self-Assembly of Dopant Arrays on Si(100)
| العنوان: | Dopant Precursor Adsorption into Single-Dimer Windows: Towards Guided Self-Assembly of Dopant Arrays on Si(100) |
|---|---|
| المؤلفون: | Radue, Matthew S., Mo, Yifei, Butera, R. E. |
| سنة النشر: | 2021 |
| المجموعة: | Condensed Matter Physics (Other) |
| مصطلحات موضوعية: | Condensed Matter - Materials Science, Physics - Chemical Physics |
| الوصف: | Atomically precise dopant arrays in Si are being pursued for solid-state quantum computing applications. We propose a guided self-assembly process to produce atomically precise arrays of single dopant atoms in lieu of lithographic patterning. We leverage the self-assembled c(4x2) structure formed on Br- and I-Si(100) and investigate molecular precursor adsorption into the generated array of single-dimer window (SDW) adsorption sites with density functional theory (DFT). The adsorption of several technologically relevant dopant precursors (PH$_3$, BCl$_3$, AlCl$_3$, GaCl$_3$) into SDWs formed with various resists (H, Cl, Br, I) are explored to identify the effects of steric interactions. PH$_3$ adsorbed without barrier on all resists studied, while BCl$_3$ exhibited the largest adsorption barrier, 0.34 eV, with an I resist. Dense arrays of AlCl$_3$ were found to form within experimentally realizable conditions demonstrating the potential for the proposed use of guided self-assembly for atomically precise fabrication of dopant-based devices. Comment: (18 pages, 4 figures) |
| نوع الوثيقة: | Working Paper |
| DOI: | 10.1016/j.cplett.2021.139258 |
| URL الوصول: | http://arxiv.org/abs/2106.10556 |
| رقم الأكسشن: | edsarx.2106.10556 |
| قاعدة البيانات: | arXiv |
| DOI: | 10.1016/j.cplett.2021.139258 |
|---|