Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes

التفاصيل البيبلوغرافية
العنوان: Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes
المؤلفون: Çiftçi, H. Tunç, Verhage, Michael, Cromwijk, Tamar, Van, Laurent Pham, Koopmans, Bert, Flipse, Kees, Kurnosikov, Oleg
المصدر: Microsyst Nanoeng 8, 51 (2022)
سنة النشر: 2022
المجموعة: Condensed Matter
Physics (Other)
مصطلحات موضوعية: Physics - Instrumentation and Detectors, Condensed Matter - Mesoscale and Nanoscale Physics
الوصف: We present a new approach to tuning fork-based atomic force microscopy for utilizing advanced "tip-on-chip" probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 mm x 2 mm drastically perturb the oscillation of the tuning fork, resulting in poor performance in its intrinsic force sensing. Therefore, restoring initial oscillatory characteristics is necessary for regaining high sensitivity. To this end, we developed a new approach consisting of three basic steps: tuning fork rebalancing, revamping holder-sensor fixation, and electrode reconfiguration. Mass rebalancing allows the tuning fork to recover the frequency and regain high Q-factor values up to 10E4 in air and up to 4 x 10E4 in ultra-high vacuum conditions. The floating-like holder-fixation using soft wires significantly reduces energy dissipation from the mounting elements. Combined with the soft wires, reconfigured electrodes provide electrical access to the chip-like probe without intervening in the force-sensing signal. Finally, our easy-to-implement approach allows converting the atomic force microscopy-tip from a passive tool to a dedicated microdevice with extended functionality.
Comment: 11 pages including references, 8 figures
نوع الوثيقة: Working Paper
DOI: 10.1038/s41378-022-00379-x
URL الوصول: http://arxiv.org/abs/2202.00952
رقم الأكسشن: edsarx.2202.00952
قاعدة البيانات: arXiv
الوصف
DOI:10.1038/s41378-022-00379-x