Johnson-noise-limited cancellation-free microwave impedance microscopy with monolithic silicon cantilever probes

التفاصيل البيبلوغرافية
العنوان: Johnson-noise-limited cancellation-free microwave impedance microscopy with monolithic silicon cantilever probes
المؤلفون: Shan, Jun-Yi, Morrison, Nathaniel, Chen, Su-Di, Wang, Feng, Ma, Eric Y.
المصدر: Nat. Commun. 15, 5043 (2024)
سنة النشر: 2024
المجموعة: Condensed Matter
مصطلحات موضوعية: Condensed Matter - Mesoscale and Nanoscale Physics
الوصف: Microwave impedance microscopy (MIM) is an emerging scanning probe technique for nanoscale complex permittivity mapping and has made significant impacts in diverse fields from semiconductors to quantum materials. To date, the most significant hurdles that limit its widespread use are the requirements of specialized microwave probes and high-precision cancellation circuits. Here we show that forgoing both elements not only is feasible but actually enhances MIM performance. Using monolithic silicon cantilever probes and a cancellation-free architecture, we demonstrate thermal Johnson-noise-limited, drift-free MIM operation with 15 nm spatial resolution, minimal topography crosstalk, and an unprecedented sensitivity of 0.26 zF/$\sqrt{\text{Hz}}$. We accomplish this by taking advantage of the high mechanical resonant frequency and spatial resolution of silicon probes, the inherent common-mode phase noise rejection of self-referenced homodyne detection, and the exceptional stability of the streamlined architecture. Our approach makes MIM drastically more accessible and paves the way for more advanced operation modes and integration with complementary techniques.
Comment: 10 pages, 7 figures
نوع الوثيقة: Working Paper
DOI: 10.1038/s41467-024-49405-8
URL الوصول: http://arxiv.org/abs/2403.03423
رقم الأكسشن: edsarx.2403.03423
قاعدة البيانات: arXiv
الوصف
DOI:10.1038/s41467-024-49405-8